Parameters:
Ion source: 2 MV Tandetron, Energy 0.2 – 2 (Q+1) * MeV
ICA Chamber: UHV compatible, base pressure: 5×10-8 mbar
Cold head: Leybold 20 K, sample holder for 4 substrate (diameter – 15 mm), XY-plane rotary stage and z-axis translator
Sample deposition: Both direct and background
Infrared Spectrometer: FTIR Bruker v70 with FIR extension , Detectors – MCT & DLaTGS
QMS: Detector – FC and SEM, mass range 1-300 amu