Ion source: 2 MV Tandetron, Energy 0.2 – 2 (Q+1) * MeV

ICA Chamber: UHV compatible, base pressure: 5×10-8 mbar

Cold head: Leybold 20 K, sample holder for 4 substrate (diameter – 15 mm), XY-plane rotary stage and z-axis translator

Sample deposition: Both direct and background

Infrared Spectrometer: FTIR Scientific Instruments (dry, purified air purged), Detectors – MCT (dry, purified air purged)

QMS: Detector – FC and SEM, mass range 1-300 amu