Ion source: 14 GHz room temperature ECRIS, Energy 0.5 – 30 Q*keV

AQUILA Chamber: Internally bakeable, base pressure 5xE-9 mbar

Cold head: Sumitomo 10 K, sample holder for 1 substrate (diameter – 15 mm), XY-plane rotary stage

Sample deposition: Both direct and background

Infrared Spectrometer: FTIR Bruker v70, Detectors – MCT & DLaTGS

QMS: Detector – FC and SEM, mass range 1-250 amu